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Experimental evidence of thermoelastic damping in silicon tuning fork

✍ Scribed by C. Muller; J. Baborowski; A. Pezous; M.-A. Dubois

Book ID
118492730
Publisher
Elsevier
Year
2009
Weight
298 KB
Volume
1
Category
Article
ISSN
1876-6196

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✍ S.J. Wong; C.H.J. Fox; S. McWilliam πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 318 KB

This paper considers thermoelastic damping of the in-plane vibration of rings. The work was motivated by the need to gain improved understanding of energy-dissipation effects in silicon MEMS resonators, for which a high Q-factor is often a key design objective. The presented analysis is based on Zen