✦ LIBER ✦

Experimental characterization of electrostatically actuated in-plane bending of microcantilevers

✍ Scribed by A. Ballestra; E. Brusa; M. Gh Munteanu; A. Somà

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Out-of-plane electrostatic actuation of

✍ O’Shea, S J; Lu, P; Shen, F; Neuzil, P; Zhang, Q X 📂 Article 📅 2005 🏛 Institute of Physics 🌐 English ⚖ 703 KB

Modelling and characterization of AlN-ac

✍ V. Ruiz, J. Hernando-García, A. Ababneh, H. Seidel, U. Schmid, J. L. Sánchez-Roj 📂 Article 📅 2012 🏛 Springer-Verlag 🌐 English ⚖ 363 KB

On-Chip Electrostatically Actuated Bendi

✍ Alberto Corigliano; Fabrizio Cacchione; Biagio De Masi; Caterina Riva 📂 Article 📅 2005 🏛 Springer Netherlands 🌐 English ⚖ 677 KB

Experimental analysis of pull-out voltag

✍ Chakraborty, S.; Bhattacharya, A.; Bhattacharyya, T.K. 📂 Article 📅 2011 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 273 KB

Bending and vibration of an electrostati

✍ Yong-Gang Wang; Wen-Hui Lin; Xiao-Meng Li; Ze-Jun Feng 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 551 KB

Closed-form empirical relations to predi

✍ M. M. Joglekar; D. N. Pawaskar 📂 Article 📅 2010 🏛 Springer-Verlag 🌐 English ⚖ 647 KB