✦ LIBER ✦
On-Chip Electrostatically Actuated Bending Tests for the Mechanical Characterization of Polysilicon at the Micro Scale
✍ Scribed by Alberto Corigliano; Fabrizio Cacchione; Biagio De Masi; Caterina Riva
- Book ID
- 106461184
- Publisher
- Springer Netherlands
- Year
- 2005
- Tongue
- English
- Weight
- 677 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0025-6455
No coin nor oath required. For personal study only.