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Experimental and theoretical studies of the build-up of an oxide layer during oxygen ion bombardment of silicon

✍ Scribed by J.A. Kilner; S.D. Littlewood; R. Badheka; M. Wadsworth; J.A. Van Den Berg; D.G. Armour

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 671 KB
Volume: 12
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(92)90264-a

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