✦ LIBER ✦

Experiment and simulation of the compositional evolution of TiâB thin films deposited by sputtering of a compound target

✍ Scribed by Neidhardt, JoÌrg; MraÌz, Stanislav; Schneider, Jochen M.; Strub, Erik; Bohne, Wolfgang; Liedke, Bartosz; MoÌller, Wolfhard; Mitterer, Christian

Book ID: 120793133
Publisher: American Institute of Physics
Year: 2008
Tongue: English
Weight: 835 KB
Volume: 104
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.2978211

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Optical and compositional characterizati

Optical and compositional characterization of GaAs(Ti) thin films deposited by R.F. magnetron sputtering

✍ A. Boronat; S. Silvestre; L. Castañer 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 833 KB

Composition of thin films deposited by i

Composition of thin films deposited by ion beam sputtering of a compound target: case of YBaCuO

✍ S. Benayoun; E. Salmon; R.J. Gaboriaud 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 459 KB

Compositional optimization of magnetite

Compositional optimization of magnetite thin films prepared by rf sputtering from a composite target of wüstite and Ge

✍ Seishi Abe; Shintaro Nakamura; Shigehiro Ohnuma 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 414 KB

Glow discharge mass spectrometry study o

Glow discharge mass spectrometry study of the deposition of TiO[sub 2] thin films by direct current reactive magnetron sputtering of a Ti target

✍ V. Vancoppenolle; P. Jouan; M. Wautelet; J. Dauchot; M. Hecq 📂 Article 📅 1999 🏛 AVS (American Vacuum Society) 🌐 English ⚖ 314 KB

Study and improvement of the adhesion of

Study and improvement of the adhesion of chromium thin films deposited by magnetron sputtering

✍ V. Guilbaud-Massereau; A. Celerier; J. Machet 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 763 KB

Structural and chemical analysis of amor

Structural and chemical analysis of amorphous B–N–C thin films deposited by RF sputtering

✍ Essafti, A.; Ech-chamikh, E.; Fierro, J.L.G. 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 181 KB

Experiment and simulation of the compositional evolution of TiâB thin films deposited by sputtering of a compound target

Experiment and simulation of the compositional evolution of TiâB thin films deposited by sputtering of a compound target