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Composition of thin films deposited by ion beam sputtering of a compound target: case of YBaCuO

✍ Scribed by S. Benayoun; E. Salmon; R.J. Gaboriaud

Book ID
107864515
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
459 KB
Volume
241
Category
Article
ISSN
0040-6090

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In situ growth of YBaCuO films by ion
In situ growth of YBaCuO films by ion beam sputtering
✍ Jianhua Hao; Xingrong Zhao; Fangqiao Zhou; Xinjian Yi; Zaiguang Li 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 322 KB

High quality Y-Ba-Cu-O superconducting thin films were fabricated in situ on ZrO 2 substrates by ion beam sputtering assisted by a molecular oxygen source. Films were characterized by X-ray diffraction, resistivity measurements and scanning electron microscopy. As-deposited films were highly oriente