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Excitation of Shear Mode Elastic Waves in Co-Sputtered ZnO Films

✍ Scribed by Wasa, K.; Hayakawa, S.; Hada, T.


Book ID
114596744
Publisher
Institute of Electrical and Electronics Engineers
Year
1974
Weight
244 KB
Volume
21
Category
Article
ISSN
0018-9537

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## Abstract Sputtering deposition of Ga‐doped ZnO (ZnO:Ga) thin films was carried out using the helicon‐wave‐excited plasma sputtering (HWPS) method. The films sputtered above 150 Β°C had a preferential {0001} orientation. According to the surface‐damage‐free nature, the films having featureless sur