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Excitation and detection of vibrations of micromechanical structures using a dielectric thin film

✍ Scribed by S. Bouwstra; F.R. Blom; T.S.J. Lammerink; H. Yntema; P. Schrap; J.H.J. Fluitman; M. Elwenspoek

Book ID: 107927699
Publisher: Elsevier Science
Year: 1989
Weight: 383 KB
Volume: 17
Category: Article
ISSN: 0250-6874
DOI: 10.1016/0250-6874(89)80083-6

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