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Excimer laser etching of diamond-like carbon films: spalling effect

โœ Scribed by T.V. Kononenko; V.G. Ralchenko; E.D. Obraztsova; V.I. Konov; Jayshree Seth; S.V. Babu; E.N. Loubnin


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
407 KB
Volume
86
Category
Article
ISSN
0169-4332

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