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Excimer laser CVD of silicon oxide on GaAs: a comparison with deposition on c-Si

✍ Scribed by P. González; E. García; J. Pou; D. Fernández; B. León; M. Pérez-Amor

Book ID: 103615977
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 212 KB
Volume: 54
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(92)90027-u

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