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Excimer laser ablation of polyimide in a manufacturing facility

โœ Scribed by J. R. Lankard; G. Wolbold

Book ID
104722135
Publisher
Springer
Year
1992
Tongue
English
Weight
668 KB
Volume
54
Category
Article
ISSN
1432-0630

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The time-dependent intensity profile of pulsed KrF excimer laser radiation reflected from polyimide is determined over a range of laser fluences, from well below to above the ablation threshold. The reflected laser beam is truncated once the incident laser radiation exceeds a threshold fluence, i.e.