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Ex-polymer SiC coatings with Al2O3 particulates as filler materials

✍ Scribed by M. Labrousse; M. Nanot; P. Boch; E. Chassagneux


Book ID
107935627
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
872 KB
Volume
19
Category
Article
ISSN
0272-8842

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Al2O3/SiO2 films prepared by electron-be
✍ Feng Zhang; Huili Zhu; Weifeng Yang; Zhengyun Wu; Hongji Qi; Hongbo He; Zhengxiu πŸ“‚ Article πŸ“… 2008 πŸ› Elsevier Science 🌐 English βš– 205 KB

Al 2 O 3 /SiO 2 films have been deposited as UV antireflection coatings on 4H-SiC by electron-beam evaporation and characterized by reflection spectrum, scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The reflectance of the Al 2 O 3 /SiO 2 films is 0.33% and 10 times l