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Evolution Roots of Growth-Induced Polytype Domains in 6H-SiC Single Crystals

✍ Scribed by Seo, Soo Hyung; Song, Joon Suk; Oh, Myung Hwan; Wang, Yen Zen


Book ID
121017017
Publisher
Trans Tech Publications, Ltd.
Year
2005
Tongue
English
Weight
506 KB
Volume
483-485
Category
Article
ISSN
1662-9752

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## Abstract Misoriented domains (MDs) are common defects in 6H‐SiC single crystals. We performed an experimental study on the formation of MDs in 2‐inch 6H‐SiC single crystals. Micro‐Raman spectroscopy revealed that the polytype of MDs was mainly 4H‐SiC. By changing growth conditions, it was found