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Bulk crystal growth of 6H-SiC on polytype-controlled substrates through vapor phase and characterization

✍ Scribed by Woo Sik Yoo; Atsushi Yamashita; Tsunenobu Kimoto; Hiroyuki Matsunami

Book ID
107790837
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
750 KB
Volume
115
Category
Article
ISSN
0022-0248

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Growth of AlN bulk single crystals on 4H
Growth of AlN bulk single crystals on 4H-SiC substrates and analyses of their structural quality and growth mode evolution
✍ Sumathi, R. R. ;Barz, R. U. ;Gigler, A. M. ;Straubinger, T. ;Gille, P. πŸ“‚ Article πŸ“… 2012 πŸ› John Wiley and Sons 🌐 English βš– 303 KB

## Abstract Aluminium nitride (AlN) bulk single crystals were grown on off‐oriented 4H‐SiC substrates by the sublimation method. High‐quality crystals with about 25 mm in diameter and up to 5 mm in thickness were obtained with an optimized growth process. The crystals show hexagonal symmetry with w