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Evolution processes in multicomponent and multiphase films

✍ Scribed by S.A. Kukushkin

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
845 KB
Volume
207
Category
Article
ISSN
0040-6090

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## Abstract The photochemical reaction SiHCl~3~+Cl~2~β†’SiCl~4~+HCl is of industrial importance in the production of pure silicon for the semiconductor industry. The present paper deals with an experimental investigation of the kinetics of this purification step. The main reaction occurs in the liqui