Trichlorosilane chlorination in a multiphase multicomponent photoreactor

✍ Scribed by Dr. Reinhard Schirmeister; Prof. Dr. Ulrich Hoffmann

• Publisher: John Wiley and Sons
• Year: 1992
• Tongue: English
• Weight: 927 KB
• Volume: 15
• Category: Article
• ISSN: 0930-7516
• DOI: 10.1002/ceat.270150202

✦ Synopsis

Abstract

The photochemical reaction SiHCl~3~+Cl~2~→SiCl~4~+HCl is of industrial importance in the production of pure silicon for the semiconductor industry. The present paper deals with an experimental investigation of the kinetics of this purification step. The main reaction occurs in the liquid phase and is initiated by light. In this gas‐liquid reaction system, all components, which are present in both phases, were analyzed by gas chromatography. Reaction progress was monitored by recording the pressure rise. Apart from the influence of wavelength and radiation intensity on the above photoreaction, reactions in the absence of light and on the wall were also investigated.