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Evolution of the Al2O3/Ge(1 0 0) interface for reactively sputter-deposited films submitted to postdeposition anneals

โœ Scribed by Nicolau Molina Bom; Gabriel Vieira Soares; Cristiano Krug; Rafael Peretti Pezzi; Israel Jacob Rabin Baumvol; Claudio Radtke


Book ID
116245119
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
756 KB
Volume
258
Category
Article
ISSN
0169-4332

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The development of new coatings with superior functionalities for high performance cutting tools is a key challenge in manufacturing. In this context, the synthesis of aluminium oxide and derivative oxide thin films is attracting large scientific and technical interests. The present paper addresses