Evolution of hydrocarbon species on a silicon surface during methane plasma investigated by in-situ infrared spectroscopy

✍ Scribed by Masanori Shinohara; Teruaki Katagiri; Keitaro Iwatsuji; Hiromichi Shibata; Yoshinobu Matsuda; Hiroshi Fujiyama

• Book ID: 108289061
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 147 KB
• Volume: 506-507
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2005.08.143