Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry

✍ Scribed by Shinohara, Masanori; Takami, Yoshiki; Takabayashi, Susumu; Oda, Akinori; Matsuda, Yoshinobu; Fujiyama, Hiroshi

• Book ID: 120658726
• Publisher: IEEE
• Year: 2013
• Tongue: English
• Weight: 553 KB
• Volume: 41
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/TPS.2013.2263850