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Evolution of compressive stress and electrical conductivity of tetrahedral amorphous carbon films with phosphorus incorporation

โœ Scribed by Liu, Aiping; Wu, Huaping; Zhu, Jiaqi; Han, Jiecai; Niu, Li


Book ID
123482486
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
713 KB
Volume
17
Category
Article
ISSN
0925-9635

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