## Beta -C 3 N 4 crystalline films have been grown on Si(100) substrates by reactive atom vapour deposition. The lattice parameters of the b-C 3 N 4 crystalline phase, determined by x-ray diffraction and transmission electron diffraction, respectively, are both in good agreement with the theoretic
✦ LIBER ✦
Evidence for mixed-phase crystalline β-C3N4 and c-BN films
✍ Scribed by Prof. Dr.-Ing. K.-T. Rie; M. Sc.-Eng. H. Ahn
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 206 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0933-5137
No coin nor oath required. For personal study only.
✦ Synopsis
Abstract
In this paper strong experimental evidence is presented suggesting that we have synthesized the β‐C~3~N~4~ phase. This is a material predicted by theory to have comparable property to diamond. The films containing mixed‐phase crystalline β‐C~3~N~4~ and c‐BN were deposited on steel substrate Ck 35 by a hot filament assisted r. f. plasma CVD method using organo‐metallic precursor. The crystal structure of these mixed‐phases was identified by X‐ray diffraction (XRD) as well as transmission electron diffraction analysis (TED).
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