EVG photoresist breakthrough

• Book ID: 104368285
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 83 KB
• Volume: 19
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(06)71614-3

✦ Synopsis

MKS Instruments, Inc. reckons it can set new standards for vacuum gauge controllers with the introduction of the PDR900 Controller.A stand alone, single channel power supply and readout unit, it is for use with all HPS Series 900 digital vacuum transducers.The PDR900 features three high power setpoint relays for process control and a leak-detection feature with an audible alarm.