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Evaluation of second generation DUV resists for advanced microprocessors

✍ Scribed by J.G. Maltabes; C. Yuan; C.C. Fu; J.S. Sturtevant; S. Blackley; L. Pressley

Book ID: 114155795
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 193 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00070-7

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