Evaluation of Oxygen Plasma and UV Ozone Methods for Cleaning of Occluded Areas in MEMS Devices

✍ Scribed by Hook, D. Adam; Olhausen, James A.; Krim, Jacqueline; Dugger, Michael T.

• Book ID: 119992737
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 652 KB
• Volume: 19
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2010.2067193