✦ LIBER ✦
Comparison of the removal efficiency for organic contaminants on silicon wafers stored in plastic boxes between UV/O3 and ECR oxygen plasma cleaning methods
✍ Scribed by Kyunsuk Choi; Tae-Jong Eom; Chongmu Lee
- Book ID
- 108388642
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 502 KB
- Volume
- 435
- Category
- Article
- ISSN
- 0040-6090
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