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Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O + H2O2 mixed gas

✍ Scribed by Ning Li; Yoshio Abe; Midori Kawamura; Kyung Ho Kim; Tsutomu Suzuki

Book ID: 113937676
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 941 KB
Volume: 520
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.04.024

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Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O&#xa0;+&#xa0;H2O2 mixed gas

Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O + H2O2 mixed gas