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Evaluation of directly bonded silicon wafer interface by the magic mirror method

✍ Scribed by Osamu Okabayashi; Haruo Shirotori; Hiroyuki Sakurazawa; Eizaburo Kanda; Takeshi Yokoyama; Mitsuo Kawashima

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 665 KB
Volume: 103
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(90)90226-b

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