Evaluation of an InAlN/AlN/GaN HEMT with Ta-based ohmic contacts and PECVD SiN passivation

✍ Scribed by Malmros, Anna; Gamarra, Piero; Thorsell, Mattias; Forte-Poisson, Marie-Antoinette di; Lacam, Cedric; Tordjman, Maurice; Aubry, Raphaël; Zirath, Herbert; Rorsman, Niklas

• Book ID: 121725857
• Publisher: John Wiley and Sons
• Year: 2014
• Tongue: English
• Weight: 312 KB
• Volume: 11
• Category: Article
• ISSN: 1862-6351
• DOI: 10.1002/pssc.201300320