Evaluating k-values for low-k materials after damascene integration: Method and results

✍ Scribed by B. Vereecke; M. Pantouvaki; I. Ciofi; G.P. Beyer; Zs. Tökei

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 734 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2010.06.012

✦ Synopsis

This work discusses a method for measuring k-values of low-k films after integration in damascene structures. The experimental results are obtained from 90 nm ½ pitch single damascene structures on low-k materials with intrinsic k-values ranging between 2.2 and 3. The measurement technique is discussed in detail with a focus on the accuracy, limitation of the method, impact of low-k damage and applicability for smaller dimensions.