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Ethyl group decomposition kinetics following adsorption of diethylsilane, diethylgermane, and ethylsilane on Si(111) 7 × 7

✍ Scribed by P.A. Coon; M.L. Wise; Z.H. Walker; S.M. George


Publisher
Elsevier Science
Year
1993
Weight
86 KB
Volume
291
Category
Article
ISSN
0167-2584

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Static secondary ion mass spectrometty (SSIMS) is shown to probe directly the coordination of surface silicon atoms to adsorbed hydrogen. Signal intensities of secondary ions, SiD', SiD: , and SiD: observed in SSIMS following D atom adsorption on Si( I 11)-(7X 7 ) are proportional to the coverages o