Absolute coverage and decomposition kinetics of Mono-, Di-, and tri-hydride phases on Si(111)-(7×7)

✍ Scribed by C.M. Greenlief; S.M. Gates; P.A. Holbert

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 471 KB
• Volume: 159
• Category: Article
• ISSN: 0009-2614
• DOI: 10.1016/0009-2614(89)87410-x

✦ Synopsis

Static secondary ion mass spectrometty (SSIMS) is shown to probe directly the coordination of surface silicon atoms to adsorbed hydrogen. Signal intensities of secondary ions, SiD', SiD: , and SiD: observed in SSIMS following D atom adsorption on Si( I 11)-(7X 7 ) are proportional to the coverages of SiD, SiD,, and SiD,, respectively. Temperature-programmed desorption is used to quantify the three coverages. The SiD: signal in temperature-programmed SSIMS is used to measure the first-order EA (31&2 kcal mol-I) and u (I x IO'"" s-l) for surface SiD,decompositiou.