Etching submicrometer trenches by using the Bosch process and its application to the fabrication of antireflection structures

✍ Scribed by Chang, Chienliu; Wang, Yeong-Feng; Kanamori, Yoshiaki; Shih, Ji-Jheng; Kawai, Yusuke; Lee, Chih-Kung; Wu, Kuang-Chong; Esashi, Masayoshi

• Book ID: 121216691
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 903 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/3/020