✦ LIBER ✦
A new technique for fabrication of OEICs-the etched back planar process-and its application to the fabrication of planar embedded InP-InGaAs p-i-n photodiodes
✍ Scribed by Shimizu, J.; Inomoto, Y.; Kida, N.; Terakado, T.; Suzuki, A.
- Book ID
- 119786295
- Publisher
- IEEE
- Year
- 1990
- Tongue
- English
- Weight
- 213 KB
- Volume
- 2
- Category
- Article
- ISSN
- 1041-1135
- DOI
- 10.1109/68.60771
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