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Etching of ZnO Films with Hexafluoroacetylacetone

✍ Scribed by Steven R. Droes; Toivo T. Kodas; Mark J. Hampden-Smith

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 224 KB
Volume: 10
Category: Article
ISSN: 0935-9648
DOI: 10.1002/(sici)1521-4095(199810)10:14<1129::aid-adma1129>3.0.co;2-i

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