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Etching of silicon carbide for device fabrication and through via-hole formation

✍ Scribed by F. A. Khan; B. Roof; L. Zhou; I. Adesida

Book ID: 107452596
Publisher: Springer US
Year: 2001
Tongue: English
Weight: 800 KB
Volume: 30
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-001-0018-y

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