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Etching mechanism of barium strontium titanate (BST) thin films in CHF3/Ar plasma

โœ Scribed by LiPing Dai; ShuYa Wang; Ping Shu; ZhiQin Zhong; Gang Wang; GuoJun Zhang

Book ID
107372630
Publisher
Springer
Year
2011
Tongue
English
Weight
578 KB
Volume
56
Category
Article
ISSN
1001-6538

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pH-sensitive properties of barium stront
pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique
โœ Vahe V. Buniatyan; Maryam H. Abouzar; Norayr W. Martirosyan; Jรผrgen Schubert; Sp ๐Ÿ“‚ Article ๐Ÿ“… 2010 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 589 KB

## Abstract pHโ€sensitive properties of barium strontium titanate (BST) highโ€k thin films as alternative gate material for fieldโ€effect capacitive (bioโ€)chemical sensors based on an electrolyteโ€insulatorโ€semiconductor system have been investigated. The BST films of different compositions (Ba~0.31~Sr