Etching characteristics and absence of electrical properties damage of PZT thin films etched before crystallization

✍ Scribed by R.H. Liang; D. Rémiens; C. Soyer; N. Sama; X.L. Dong; G.S. Wang

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 408 KB
• Volume: 85
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.12.031