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Etch Rates and Selectivities of Citric Acid/Hydrogen Peroxide on GaAs, Al[sub 0.3]Ga[sub 0.7]As, In[sub 0.2]Ga[sub 0.8]As, In[sub 0.53]Ga[sub 0.47]As, In[sub 0.52]Al[sub 0.48]As, and InP

✍ Scribed by DeSalvo, Gregory C.

No coin nor oath required. For personal study only.

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