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Etch Rate Study of Germanium, GaAs and InGaAs: A Challenge in Semiconductor Processing

✍ Scribed by Sioncke, Sonja; Brunco, David P.; Meuris, Marc; Uwamahoro, Olivier; Van Steenbergen, Jan; Vrancken, Evi; Heyns, Marc M.

No coin nor oath required. For personal study only.

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