Estimation of keV submicron ion beam width using a knife-edge method

✍ Scribed by Yasuyuki Ishii; Akira Isoya; Takuji Kojima; Kazuo Arakawa

• Book ID: 114167503
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 457 KB
• Volume: 211
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)01370-3