𝔖 Bobbio Scriptorium
✦   LIBER   ✦

ESR and IR Studies on B-Doped Hydrogenated Amorphous Silicon-Nitrogen Film

✍ Scribed by Guanghua, Chen ;Chenzhi, Zhen ;Fangqing, Zhang ;Jinlong, Cheng ;Wei, Chen


Publisher
John Wiley and Sons
Year
1986
Tongue
English
Weight
116 KB
Volume
96
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Nanostructured hydrogenated amorphous ca
✍ Somani, Prakash R. ;Yoshida, Akihiko ;Afre, Rakesh A. ;Adhikary, Sunil ;Soga, T. πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 437 KB

## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va