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Error effects in the ellipsometric investigation of thin films

✍ Scribed by K. Riedling


Publisher
Elsevier Science
Year
1981
Tongue
English
Weight
707 KB
Volume
75
Category
Article
ISSN
0040-6090

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Ellipsometric Investigations of the Refr
✍ Deineka, A. ;Jastrabik, L. ;Suchaneck, G. ;Gerlach, G. πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 65 KB πŸ‘ 1 views

Optical investigations of self-polarized PbZr 0.235 Ti 0.765 O 3 (PZT) films deposited onto Si/SiO 2 /adhesion layer/(111) Pt substrate by RF sputtering are presented in this work. Measurements were performed with a spectral ellipsometer working in rotating analyzer mode. To obtain the temperature d