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Equipment and method for ion beam control in implantation and science experiments

✍ Scribed by Konstantin O Khokhlov; Yuri G Lazarev; Grigory D Vedmanov


Book ID
114170148
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
508 KB
Volume
139
Category
Article
ISSN
0168-583X

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