Equilibrium structure of Si(001) in relation to adsorption processes during silicon CVD

✍ Scribed by J.G.E. Gardeniers; F. de Jong; L.J. Giling

• Book ID: 118363353
• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 883 KB
• Volume: 233
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(90)90183-9