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Improvement of Selectivity in Specific Adsorption by the Addition of Acetic Acid during the CVD of Silicon Alkoxide to Form a Silica Overlayer with a Molecular Sieving Property

✍ Scribed by N. Katada; S. Akazawa; M. Niwa


Publisher
John Wiley and Sons
Year
2004
Tongue
English
Weight
217 KB
Volume
10
Category
Article
ISSN
0948-1907

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