Epitaxial growth of AlN films on single-
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S. Hirata; K. Okamoto; S. Inoue; T-W. Kim; J. Ohta; H. Fujioka; M. Oshima
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Article
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2007
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Elsevier Science
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English
⚖ 587 KB
We have demonstrated the first epitaxial growth of AlN films on single-crystalline Ta substrates by the use of a low-temperature growth technique based on pulsed laser deposition (PLD). Although previous AlN films grown on Ta( 100) and ( 111) substrates have exhibited quite poor crystallinity, an ep