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Epitaxial growth of β-SiC single crystals by successive two-step CVD

✍ Scribed by Akira Suzuki; Katsuki Furukawa; Yoshiyuki Higashigaki; Shigeo Harada; Shigeo Nakajima; Toshio Inoguchi

Book ID: 107789618
Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 274 KB
Volume: 70
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(84)90275-6

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