MOCVD Growth of ZnO for Optoelectronic A
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Gruber, Th. ;Kirchner, C. ;Thonke, K. ;Sauer, R. ;Waag, A.
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Article
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2002
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John Wiley and Sons
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English
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In this paper we report on the metal-organic chemical vapour deposition of ZnO layers. We focus on heteroepitaxial growth on c-plane Al 2 O 3 and the influence of the VI/II ratio during growth on the properties of the layers. The layer quality has been investigated by HRXRD, PL and reflectivity meas