Epitaxial Growth and Surface Roughness Control of Ferromagnetic Thin Films on Si by Sputter Deposition
β Scribed by Jianhua Joshua Yang; C.-X. Ji; Ying Yang; Hua Xiang; Y. A. Chang
- Book ID
- 107455067
- Publisher
- Springer US
- Year
- 2007
- Tongue
- English
- Weight
- 449 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0361-5235
No coin nor oath required. For personal study only.
π SIMILAR VOLUMES
## Abstract Hexagonal aluminium nitride (AlN) and zinc oxide (ZnO) thin films have been deposited by DC and RF reactive magnetron sputtering at room temperature. For a first set of samples, sputtered AlN films were deposited on silicon ZnO substrate. For a second set, ZnO films were deposited on Al
## Abstract Singleβphase Ξ²β and Ξ±βFeSi~2~ thin films can be grown on Si(100) with and without a thin Fe buffer layer by adopting a facing target radioβfrequency magnetron sputtering method. The role of the buffer layer on the formation of Ξ²β and Ξ±βFeSi~2~ thin film was discussed. The composition of