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Epitaxial crystallization and changes in the structure of surface layers of polymers

✍ Scribed by E. G. Moisya; G. M. Semenovich; Yu. S. Lipatov

Book ID
112363584
Publisher
Springer
Year
1976
Tongue
English
Weight
263 KB
Volume
10
Category
Article
ISSN
0040-5760

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The gas-phase epitaxy of AlN on saphire substrates in the system Al-HCl-NH,-Ar was investigated. The uniformity and structural perfection of the layers were shown to be determined by gas dynamics in the growth zone. The growth rate of A1N-layer is proportional to AlCl concentration in the growth zon